论文

基于内嵌空腔绝缘体上硅的GAA器件电学表征与分析
周虹阳，刘强，赵兰天，陈锦，俞文杰

半导体技术
2023,48(07):563-569. https://bdtj.cbpt.cnki.net/portal/journal/portal/client/paper/4da7f11f06fcbc123bf8aa15946d75d2
空腔嵌入绝缘体上硅衬底制备技术
贾欣，刘强，母志强，周虹阳，俞文杰

物理学报
2023, 72(12): 127302. https://wulixb.iphy.ac.cn/article/doi/10.7498/aps.72.20230198
Junctionless nanosheet gate-all-around transistors fabricated on void embedded silicon on insulator substrate
Zhiqiang Mu*, Hongyang Zhou, Yumeng Yang, Qiang Liu, Xing Wei, Wenjie Yu*

Electronics Letters
2023, 59(4), e212740. https://doi.org/10.1049/ell2.12740
In Situ Synchrotron XRD Characterization of Piezoelectric Al1-xScxN Thin Films for MEMS Applications
Wenzheng Jiang, Lei Zhu, Lingli Chen, Yumeng Yang, Xi Yu, Xiaolong Li, Zhiqiang Mu* and Wenjie Yu*

Materials
2023,16(5), 1781. https://doi.org/10.3390/ma16051781
3.3 GHz BAW Resonators Fabricated on Single Crystal AlN Templates
Ruidong Qin, Congquan Zhou, Wentong Dou, Jinghong Lu, Yumeng Yang, Zhiqiang Mu, Wenjie Yu

2023 IEEE International Ultrasonics Symposium (IUS), Montreal, QC, Canada
2023, pp. 1-4. https://doi.org/10.1109/IUS51837.2023.10306967
Super-High-Frequency Bulk Acoustic Resonators Based on Aluminum Scandium Nitride for Wideband Applications
Wentong Dou, Congquan Zhou, Ruidong Qin, Yumeng Yang, Huihui Guo, Zhiqiang Mu, Wenjie Yu

Nanomaterials
2023, 13(20), 2737. https://doi.org/10.3390/nano13202737
High-throughput screening for giant bulk spin-split materials
Yu He, Xin Li, Jiong Yang, Weimin Li, Gang Li, Tingjun Wu, Wenjie Yu, Lei Zhu*

Results in Physics
2023, 49, 106490. https://doi.org/10.1016/j.rinp.2023.106490
Fabrication technology of void embedded silicon-on-insulator substrate
Xin Jia, Liu Qiang*, Zhiqiang Mu, Hongyang Zhou, Wenjie Yu*

Acta Phys. Sin.
2023, 72(12): 127302. https://doi.org/10.7498/aps.72.20230198
Total Ionizing Dose Hardening of Planar SOI MOSFET through An Optimal Design Combining Embedded Void and H-gate Structures
Jin Chen, Qiang Liu*, Zhiqiang Mu, Xing Wei, Wenjie Yu*

IEEE Electron Device Letters
2023, 44(10): 1608-1611. https://doi.org/10.1109/LED.2023.3305311
Effect of imine-containing inhibitor molecules on cobalt electrodeposition
Yu He, Tingjun Wu, Lei Zhu, Xin Li, Weimin Li, Wenjie Yu

Semiconductor Technology
2023, 48(10): 911-918. https://doi.org/10.13290/j.cnki.bdtjs.2023.10.008
Doping Engineering for Optimizing Piezoelectric and Elastic Performance of AlN
Xi Yu, Lei Zhu, Xin Li, Jia Zhao, Tingjun Wu, Wenjie Yu, Weimin Li

Materials
2023, 16(5), 1778. https://doi.org/10.3390/ma16051778
Effects of Process to Material Removal in CMP: Modelling and Experiments
Yanming Ren, Yiran Liu, Zijun Guan, Lei Zhu, Yuanda Gao, Wenjie Yu, Weimin Li

In 2023 China Semiconductor Technology International Conference (CSTIC), Shanghai, China
2023, pp. 1-4. https://doi.org/10.1109/CSTIC58779.2023.10219260